Characterization of periodic nano- structures by Spectroscopic Ellipsometry

Characterization of periodic nano-structures by Spectroscopic Ellipsometry

Principles of Ellipsometry      Applications of Ellipsometry    About Eoptics

Out line

Basic Principle of Ellipsometry

Measurement information of Ellipsometry for thin films

From Ellipsometry to Scatterometry

From conventional Ellipsometry to Mueller Matrix Ellipsometry